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Semi-Conductor Equipment

Wet Station ▼

Auto Wet Station

It etches and cleans any stacked membranes on the board of Silicon or Sapphire Wafer.

  • Wafer Application : 5”, 6”, 8” and 12” Silicon Wafer
  • Loading Method : Auto ~ Manual
  • Processing Method : Cassetteless or Cassette Type
  • Bath : Teflon & Quartz etc
  • Chemical : ACID, Organic, Alkali
  • Controller : PLC & Touch Based Control
  • Remark : Heating Unit / Chemical Circulation & Filtering / DIW Non-Ohmmeter / G.U.I & Host On-Line is performable.
Tube Cleaner ▼

Tube Cleaner

It cleans Quartz Tube for the semi-conductor DIFF process using chemical (HF, HNO3, DIW).

  • Size : User’s Spec
  • Material : HT PVC & Ivory PVC & SUS304
  • Controller : PLC & Touch Based Control
  • Auto & Manual Control
  • Chemical Mixing Tank
  • Horizontal or Vertical type
  • Remark : Rolling Unit, PH Meter etc
Parts Cleaner ▼

Parts Cleaner

  • It cleans jigs and parts of different types for semi-conductor and FPD.
  • It cleans materials (Quartz, Al, SiC, Si etc) in super precision using chemical and ultrasonic.
  • Customer can order their special equipment with appropriate cleaning method according to their cleaning objects and types of dirt (dust, stain etc), which will be manufactured by Seller.
Spin Dryer ▼

Spin Dryer (Hot-N2 Type)

It dries Wafer using Water Cassette of the low RPM and Hot-N2.

  • Wafer Application : 4”,5”, 6”, 8” and 12” Silicon wafer
  • Method : Auto ~ Manual
  • Processing Method : 1~2 Carrier is OK / Vertical or Horizontal Type
  • Chemical : DIW
  • Controller : PLC & Touch Based Control
  • Remark : Hot-N2 System / Recipe is performable
PLP Cleaner ▼

PLP CLEANER

  • Cell Application : EMC & EMC + Glass (Carrier)
  • Loading Method : EFEM Robot Access Lift Pin Loading
  • Processing Method : DIW Shower Cleaning
  • Controller : PLC & Touch Based Control
  • Safety Certificate : KCS Certificate
  • Option Item : USC or MSC
Plating System ▼

Plating System

It is an electro / electroless plating equipment for Semi-Conductor or Solar Cell Wafer.

  • Size : User’s Spec
  • Material : White PP & SUS304
  • Controller : PLC & Touch Based Control
  • Chemical Mixing Tank
  • Process : PLC & Touch Based Control

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